Trans-1,2-Dichloroethylene DCE | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
Molecular Formula: C2H2Cl2
Molecular Weight:96.94
Physical and Chemical Properties
Colorless, transparent liquid with irritating odor. Melting point: -57¡æ. Boiling point: 48¡æ. Density: 1.265g/ml. Incompatible with oxidizing agents, bases. Stable, but may decompose on exposure to air, moisture or light.Highly flammable.
Applications
Acts as a high purity ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning in semiconductor industries, solar cell, semiconductor discrete devices¡¯ fabrication and MEMS (Micro-Electro-Mechanical Systems). For CVD process at lower temperatureless than 800¡æ£¬Trans 1, 2-Dichloroethylene is better than any other known chlorine sources.
Specifications
Package
Container: Quartz Bubbler
Net Content:1500ml
Packaging: Metal Drum |
||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||