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Trans-1,2-Dichloroethylene DCE
Molecular Formula: C2H2Cl2
 
Molecular Weight:96.94            
       
Physical and Chemical Properties
    Colorless, transparent liquid with irritating odor. Melting point: -57¡æ. Boiling point: 48¡æ. Density: 1.265g/ml. Incompatible with oxidizing agents, bases. Stable, but may decompose on exposure to air, moisture or light.Highly flammable.
 
Applications
    Acts as a high purity ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning in semiconductor industries, solar cell, semiconductor discrete devices¡¯ fabrication and MEMS (Micro-Electro-Mechanical Systems). For CVD process at lower temperatureless than 800¡æ£¬Trans 1, 2-Dichloroethylene is better than any other known chlorine sources.
 
Specifications
 
Analytical Item
Specification
Analytical Item
Specification
Purity
99.999995%£¨7.5N£©
Na  max
0.2ppb
 Al  max
0.2ppb
 Ni  max
0.1ppb
 Ag  max
0.1ppb
 Nb  max
0.1ppb
 As  max
0.1ppb
 P  max
0.9ppb
 Au  max
0.1ppb
 Pb  max
0.1ppb
 B   max
1.0ppb
 Sb  max
0.1ppb
 Ba  max
0.1ppb
 Sn  max
0.1ppb
 Bi  max
0.1ppb
 Si  max
0.9ppb
 Ca  max
0.4ppb
 Sr  max
0.1ppb
 Cd  max
0.1ppb
 Ti  max
0.1ppb
 Co  max
0.1ppb
 Zn  max
0.1ppb
 Cu  max
0.1ppb
Assay
99.97%
 Cr  max
0.1ppb
Acidity(HCl) max
5ppm
 Fe  max
0.5ppb
Water(H2O)  max
15ppm
 Ga  max
0.1ppb
Particles¡Ý0.1µm max
5p/ml
 Hg  max
0.1ppb
Particles¡Ý0.2µm max
3p/ml
K   max
0.1ppb
Particles¡Ý0.5µm max
1p/ml
 Li  max
0.1ppb
Color
£¼10APHA
 Mg  max
0.1ppb
Appearance
Colorless,clear liquid
 Mn  max
0.1ppb
Shelf Life
24 months
 
Package
 
Container: Quartz Bubbler
Net Content:1500ml
Packaging: Metal Drum
 
Copyright  ©  2010-2011    Wuhan Golden Kylin Industry & Trade co., Ltd  Email:pack@golden-wing.cn   pack@goldenkylin-packaging.com     ¶õICP±¸10015578ºÅ